山武气体质量流量计CMS系列是使用了山武独自开发的超微小流速传感器—UF（microflow）传感器的新一代气体质量流量计。这一传感器是一个芯片型感热式质量流量传感器，直接安装于流体管路中，可以测量极低流速的流体流量，使CMS具有100:1高测量比。UF传感器无以伦比的卓越性能，加上独自开发的整流机构，使得本产品以相当于浮子式流量计的价格实现了高精度、高分辨率、宽测量范围的气体质量流量测量。 CMS气体流量计特点： 1：由于采用直接质量流量测量，因此实现了不受温度、压力变动影响的**测量

2：实现了3%RD的高精度，0.5%FS的重复性、100:1的高量程能力，同时也满足了低价格的要求

3：CMS具有瞬时、累计流量显示、模拟输出、累计脉冲输出、事件输出2点、模拟输出定标功能以及RS-485通信功能

4：采用独特的管内壁测量方式，实现了500PA（CMS200一次压力49KPA）的低压力损失.

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